Coating Equipment

An all-in-one lightweight vacuum coating machine integrating coating, plasma cleaning, and precision dry etching.

Its basic principle is to accelerate the charged ions in a specific vacuum environment to bombard the surface of electronic products at high speed. While removing contaminants from the surface, charged ions are implanted into the substrate surface, and then a nanometer-scale protective film is formed through a chemical reaction, uniformly covering the surface of the electronic products; if plasma or reactive gases are used for etching, precision etching can be achieved with the help of specially designed fixtures. The chamber volume of the PUMA machine is 230 liters, and the footprint is approximately 1800mm(L) X 1500mm(D) X 1800mm(H).

Plasma-enhanced vacuum Coating Machine with mass production capability.

Coating process is composed of introducing the gas-liquid mixed precursor into the vacuum chamber, adsorbing onto the surface of the to-be-coated workpieces, and then forming a uniform and conformal coating on the workpieces. The chemical reaction initiated by the plasma and the coating is then cured into a film.

The resulting film features super hydrophobicity and oleophobicity, as well as certain barrier properties, and also exhibits a certain resistance to salt spray.

The chamber volume of the Dolphin machine is 675 liters, and the footprint is approximately 2500mm(L) X 1500mm(D) X 1800mm(H).

A parylene vacuum coating machine with mass production capability.

Its basic principle is that in a specific vacuum environment, the active molecules are first deposited on the surface of the solid substrate, and then form a coating through a chemical reaction.

The molecules are deposited layer by layer, and the film grows accordingly until a micron-thick protective film is formed that uniformly, conformly wraps the surface of the electronic product.

The micron film can completely isolate electronic products from water and other corrosive substances, meeting the requirements of water-resistance, salt-resistance, and corrosion protection (acids, alkali, smog, etc.) for electronic products.

The chamber volume of the Raptor machine is 810 liters, and the footprint is approximately 4500mm(L)X2200mm(D)X2100mm(H).

Tiger is an ALD coater where film growth progresses layer by layer at the atomic level. This unique technology enables the deposition of defect-free ultrathin films on the substrate surface. The continuous surface reaction ensures high conformality of the films while also enabling precise control of the film thickness at the atomic scale.

We can offer small-chamber laboratories experimental equipment (such as 200mm in diameter) to large-scale production equipment greater than one meter in diameter, meeting the needs of customers for integrated, fully automatic, and different sizes of Tiger equipment.

The chamber dimension is: 500mm(L)X500mm(D)X500mm(H).